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Microwave plasma for gas abatement
The growing demands of gas abatement
Industrial processes increasingly generate hazardous gases such as VOCs, fluorinated compounds, and toxic by-products. Semiconductor manufacturing, chemical processing, and advanced materials production require high-efficiency gas abatement solutions capable of handling complex gas mixtures while meeting strict environmental regulations.
Traditional abatement technologies often face limitations in efficiency, scalability, and operational costs—especially when dealing with stable molecules such as fluorinated gases.
Microwave plasma as an advanced abatement solution
Microwave plasma, operating at 2.45 GHz, offers a powerful alternative for gas treatment. With recent advances in solid-state microwave generators, microwave plasma has become a robust and industrially scalable solution for gas abatement.
Key advantages of microwave plasma
Homogeneous and stable plasma
Our technologies generate highly uniform plasma, ensuring consistent treatment conditions and improved process repeatability.
High ionization efficiency
High ionization density enables enhanced reaction kinetics, optimized yields, and improved process performance.
Scalable multi-source architecture
Multi-source integration enables wide and uniform plasma distribution, supporting large-area processing and seamless industrial scale-up.
Efficient power transfer
Direct energy coupling minimizes power losses, ensuring high energy efficiency and stable plasma generation
Efficient and scalable gas treatment using microwave plasma technology
Unlike conventional thermal or radio frequency based systems, microwave plasma enables:
- Electrode-less operation, eliminating contamination and maintenance issues
- High radical density, allowing efficient decomposition of stable molecules
- Lower operating temperatures, reducing energy consumption and system stress
PLASMASPIN RANGE
Discover Sairem’s PlasmaSpin source for gas abatement, including VOC and fluorinated gas treatment, as well as applications in gasification, and more.
PlasmaSpin is a plasma source designed for efficient industrial gas treatment and advanced plasma processes.
It generates stable plasma columns inside a dielectric tube integrated into a WR340 waveguide, operating from low pressure to atmospheric conditions.
Compatible with various materials and tube diameters, it adapts to different gas flows and process requirements.
Advanced features such as vortex gas injection, automatic ignition, and impedance tuning optimize performance and process control.
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