PlasmaThin 2450 MHz – Microwave plasma source
High-precision plasma source for surface treatment, deposition, and advanced plasma applications
PlasmaThin microwave plasma source is designed by SAIREM to generate stable, reproducible plasma columns for industrial and scientific processes.
Based on surface wave propagation along a dielectric interface, PlasmaThin enables efficient plasma generation from low pressure (10⁻² mbar) up to atmospheric conditions, ensuring exceptional flexibility across applications.
Operating at 2450 MHz, PlasmaThin integrates seamlessly with solid-state microwave generators, delivering precise plasma control for advanced material processing, surface activation, and analytical applications.
Stable plasma without retuning
The surface wave principle combined with integrated tuning ensures near-zero reflected power, enabling highly stable plasma operation without adjustment between runs.
Integrated ignition and efficient coupling
Built-in ignition system and inductive coupling enable efficient plasma initiation and minimal reflected power, improving overall system performance.
Wide pressure operating range
Operates from 10⁻² mbar to atmospheric pressure, offering unmatched flexibility for both vacuum and open-air plasma processes.
Reproducible and controlled plasma generation
For fixed operating conditions, plasma ignition and stability are fully reproducible, ensuring consistent process results and repeatability.
Technical overview of PlasmaThin
PlasmaThin is a compact microwave plasma source based on surface wave propagation along a dielectric tube, where the plasma behaves as a conductive medium.
This design allows the generation of elongated plasma columns, whose length depends on pressure, gas composition, and microwave power.
PlasmaThin operates using a dielectric tube where the microwave field propagates along the plasma interface, allowing the formation of controlled plasma columns. The system achieves nearly zero reflected power thanks to integrated tuning, ensuring efficient energy transfer and repeatable plasma conditions.
The system includes:
- Integrated impedance tuning (two adjustment points)
- Dielectric tubes (6 mm / 8 mm diameter)
- Gas inlet and cooling connections
- Compatibility with solid-state microwave generators
Its architecture ensures high efficiency, low reflected power, and stable plasma propagation, making it ideal for both R&D and industrial environments.
Precise plasma ignition with integrated system
Stable operation across wide pressure ranges
Flexible use with different gases (Ar, O₂, CF₄, etc.)
Easy integration into analytical or processing setups
PlasmaThin for a wide range of scientific, biomedical, and industrial plasma applications
- Atomic Layer Deposition (ALD)
- Surface activation
- Biomedical and environmental applications
- Sterilization and disinfection, and more
Its flexibility makes it suitable for research laboratories, medical applications, and industrial plasma systems.
Test our microwave plasma source!
Looking for an innovative microwave plasma solution? Contact our experts for more information.
Build your complete plasma system
For optimal performance, integrate PlasmaThin with solid-state microwave generators, offering:
- Precise power control
- Fast response and modulation
- Enhanced process stability
- Full system integration for plasma applications