Microwave plasma sources for industrial and research applications
SAIREM develops advanced microwave plasma sources and power generators designed for research laboratories and high-tech industries.
Our plasma technologies enable the generation of high-density microwave plasmas for applications such as thin film deposition, dry etching, surface treatment, gas abatement and power-to-X processes.
SAIREM plasma systems combine microwave plasma sources, microwave generators and advanced power control and multi-source configurations.
This integrated approach allows the creation of highly uniform, scalable plasma systems suitable for both laboratory research and industrial production.
SAIREM plasma technologies are widely used in industries such as semiconductors, advanced material, lab-grown diamonds, environmental technologies.
SAIREM develops several types of microwave plasma sources adapted to different pressure regimes and process requirements.
Innovative microwave plasma sources
SAIREM microwave plasma sources enable the generation of high-density, highly reactive plasma for advanced industrial and research processes such as gas abatement, methane reforming, PECVD thin-film deposition, etching, surface treatment and more.
High density and reactive species
Microwave plasma sources generate very high plasma densities and large concentrations of reactive species.
Electrode-less plasma
No electrodes are in direct contact with the plasma. This allows longer operating cycles and higher process purity (no electrode contamination).
Scalable plasma generation
SAIREM plasma sources can be arranged in matrix or multi-source configurations, enabling the generation of large and uniform plasma surface.
Self-matching design
Our sources are designed to be self-matching. It means no impedance matching required for stable and easy operation.
Solid-state and magnetron microwave generators
SAIREM plasma sources operate in combination with high-performance microwave generators to create stable and efficient plasma systems. Our generators provide the precise power control required for demanding plasma processes such as PECVD, etching, gas abatement, and methane conversion.
Both magnetron generators and solid-state generators can be used depending on the application requirements, offering flexibility in power control, stability, and integration.
A microwave plasma source uses microwave electromagnetic waves to ionize a gas and generate plasma containing ions, electrons, and highly reactive species. Microwave plasmas are known for their ability to generate high plasma densities and large concentrations of reactive species, which makes them highly effective for advanced industrial and research processes.
These plasmas can operate across a wide pressure range and without electrodes, making them suitable for applications requiring clean and stable plasma generation.
Microwave plasma technology offers several advantages compared to conventional plasma systems:
- High plasma density and high concentration of reactive species
- Electrode-less plasma generation, reducing contamination
- Stable operation across wide pressure ranges
- Efficient energy transfer directly into the plasma
These characteristics make microwave plasma particularly suitable for advanced material processing and chemical reactions.
Microwave plasma sources require a microwave generator to deliver the electromagnetic energy needed to sustain the plasma.
When combined with SAIREM solid-state microwave generators, the power delivered to the plasma can be controlled watt by watt, ensuring stable operation and precise process control.
This architecture enables highly stable plasma systems for demanding industrial processes.
Yes. SAIREM plasma sources can be arranged in multi-source configurations, such as matrix, circular, or inline arrangements.
This approach allows the generation of large and uniform plasma surfaces, enabling industrial-scale processing with plasma density uniformity typically within about 5%.
Yes. SAIREM microwave plasma sources are designed as compact OEM components that can be integrated into custom equipment.
They are developed for industrial environments and can be combined with microwave generators and reactors to build complete plasma processing systems.
Microwave plasma sources must be powered by microwave generators that supply electromagnetic energy to sustain and control the plasma. SAIREM generators provide the precise power control required to ignite and maintain plasma, allowing stable operation over a wide range of pressures and process conditions.
Yes. The patented self‑matching design of the sources and digital control of the generators eliminate the need for external impedance matching systems and allow power control watt by watt for optimized plasma generation.
SAIREM offers a range of microwave generators suitable for plasma applications, including compact solid‑state generators (e.g., GMS series) for precision control and high‑power magnetron generators for industrial scale systems. These generators can be integrated with plasma sources to support applications like PECVD, etching, gas abatement, and Power‑to‑X processing.
When using SAIREM solid‑state microwave generators, each plasma source’s power can be controlled independently. This capability ensures that multi‑source configurations (matrix, circular, linear) maintain uniform plasma density across large surfaces — a key requirement for industrial applications such as thin‑film deposition or etching.
SAIREM plasma sources can be arranged in multi‑source configurations to generate large areas of uniform plasma. By combining multiple sources each powered and controlled by SAIREM generators, systems can be scaled from laboratory setups to industrial reactors for processes with high throughput requirements.
Talk with SAIREM experts about your microwave plasma needs
Our team supports manufacturers and laboratories in selecting and implementing the plasma equipment for their process.
A global leader in microwave and radio frequency technology
With more than 45 years of experience, SAIREM is a global leader in industrial microwave and radiofrequency technology. Our equipment operates in more than 70 countries, supporting manufacturers, research laboratories and industrial partners worldwide.
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