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EvoMicro – Microwave 2450 MHz solid-state generators
Precision microwave generators for research and industrial applications
SAIREM’s EvoMicro solid-state generators are designed to deliver highly precise and stable microwave power for applications requiring advanced control, flexibility, and repeatability.
Operating at 2450 MHz, these generators rely on semiconductor technology, enabling accurate adjustment of power, frequency, and pulse parameters. Their fully digital architecture allows fine tuning of microwave energy, making them ideal for laboratory processes, plasma generation, and advanced material treatments.
Available in 200 W and 450 W, EvoMicro generators are perfectly suited for low to medium power applications, from R&D environments to industrial integration with compact footprint and high reliability.
Pinpoint control and flexibility
Solid-state technology enables precise adjustment of power (1 W steps), frequency tuning (±50 MHz), and optional pulse modulation, allowing full control over the energy delivered to the process.
Advanced process stability
Built-in auto-tuning algorithms continuously minimize reflected power, ensuring stable operation even with varying loads or complex materials.
Safe and reliable operation
With no high voltage and no magnetron, EvoMicro generators offer extended lifetime, enhanced safety, and reduced maintenance requirements.
Easy integration
Compact, single-module design with full connectivity (fieldbus, PLC compatibility) allows seamless integration into laboratory setups or automated industrial systems.
Technical overview of EvoMicro, 2450 MHz solid-state generators
EvoMicro 200 W
Compact and highly flexible generator for precision processes, offering maximum flexibility and pulse capabilities
- Adjustable power: 0 to 200 W
- Frequency range: 2400 – 2500 MHz
- Pulse mode available for advanced process control
- Ultra-fast pulse response (<50 µs)
- Frequency sweep and auto-tuning for optimal matching
- Very low ripple (<0.2%)
- Designed for R&D, plasma, and fine process control
Both EvoMicro generators share advanced solid-state features:
- Semiconductor technology (no magnetron, no high voltage)
- Built-in isolator with automatic protection against reflected power
- True RMS measurement of forward and reflected power
- Frequency tuning ±50 MHz around 2450 MHz
- Frequency scan function to optimize matching conditions
- Auto-tune algorithm for real-time process stability
- Stable operation from 1 W
- Compact, single-module design
- Remote control via PROFIBUS®, CANopen, Modbus
EvoMicro 450 W
Higher power solution for continuous and stable operation
- Adjustable power: 0 to 450 W
- Frequency range: 2400 – 2500 MHz
- Continuous wave operation
- Frequency tuning and auto-tuning algorithm
- Very low ripple (<0.4%)
- Compact and robust design
- Suitable for industrial and advanced laboratory processes
Both EvoMicro generators share advanced solid-state features:
- Semiconductor technology (no magnetron, no high voltage)
- Built-in isolator with automatic protection against reflected power
- True RMS measurement of forward and reflected power
- Frequency tuning ±50 MHz around 2450 MHz
- Frequency scan function to optimize matching conditions
- Auto-tune algorithm for real-time process stability
- Stable operation from 1 W
- Compact, single-module design
- Remote control via PROFIBUS®, CANopen, Modbus
Semi-conductors for the precision industries
Since the outset, our solid state generators at 915 MHz and 2,45 GHz have been designed with precision applications in mind:
- Medical devices which require a stable and narrow microwave signal
- Plasma systems with solid state generators and independently controlled plasma sources
- Deposition and etching applications (PE-ALD, PE-ALE)
- Sensitive low pressure surface treatment (PECVD) applications
Why choose SAIREM microwave generators
Patented technology
Our solid-state generators have several patented features which make them both unique and the most advanced in the market. For example our auto-tune algorithm (patent WO/2012/146870) automatically controls the frequency in order to minimize the reflected power.
Another groundbreaking feature is the combination technology (patent WO/2019/224481 ) which allows us to build the most compact solid-state generators on the market.
SAIREM expertise strengths
Unlike other manufacturers who come from the telecom field, and have experience in low power microwave systems, our solid-state generators are designed from the outset for industrial applications and constraints, which guarantees their sturdiness and reliability over time.
Complete your microwave installation!
Looking to integrate solid-state microwave generators into your process?
A full range of accessories
To complete your microwave installation, SAIREM offers a full range of accessories and components, including waveguides, measurement accessories and impedance tuners.
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